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Search Results - Meissl, Mario
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Nanoscale Magnification and Shape Control System for Precision Overlay in Jet and Flash Imprint Lithography
by
Cherala, Anshuman
,
Schumaker, Philip
,
Mokaberi, Babak
,
Selinidis, Kosta
,
Choi, Byung Jin
,
Meissl, Mario J.
,
Khusnatdinov, Niyaz N.
,
LaBrake, Dwayne
,
Sreenivasan, S. V.
Published in
IEEE/ASME transactions on mechatronics
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Overlay models for nanoimprint lithography
by
Roy, Nilabh
,
Meissl, Mario
,
Yoshida, Takahiro
,
Cherala, Anshuman
,
Lu, Xiaoming
,
Klein, Jeff
,
Lou, Mingji
,
Choi, Jin
,
Sekiguchi, Hiroyuki
,
Shibayama, Takashi
,
Hiura, Mitsuru
Published in
Journal of micro/nanolithography, MEMS, and MOEMS
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Inkjet-based deposition of polymer thin films enabled by a lubrication model incorporating nano-scale parasitics
by
Singhal, Shrawan
,
Meissl, Mario J.
,
Bonnecaze, Roger T.
,
Sreenivasan, S. V.
Published in
Physics of fluids (1994)
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Characterization and modeling of volumetric and mechanical properties for step and flash imprint lithography photopolymers
by
Colburn, Matthew
,
Suez, Itai
,
Choi, Byung Jin
,
Meissl, Mario
,
Bailey, Todd
,
Sreenivasan, S. V.
,
Ekerdt, John G.
,
Willson, C. Grant
Published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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Ieee
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Ieee/Asme Transactions On Mechatronics
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Journal Of Micro/Nanolithography, Mems, And Moems
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Journal Of Micro/Nanopatterning, Materials, And Metrology
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Journal Of Vacuum Science & Technology B: Microelectronics And Nanometer Structures
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Journal Of Vacuum Science & Technology B: Microelectronics And Nanometer Structures Processing, Measurement, And Phenomena
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Journal Of Vacuum Science & Technology. B, Microelectronics And Nanometer Structures Processing, Measurement And Phenomena
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Journal Of Vacuum Science & Technology. B, Microelectronics Processing And Phenomena
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Physics Of Fluids
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Science Citation Index Expanded (Web Of Science)
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American Institute Of Physics:jisc Collections:transitional Journals Agreement 2021-23 (Reading List)
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American Institute Of Physics
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