Showing
1 - 3
results of
3
Skip to content
VuFind
Log in
Library Catalogue Plus
Library
Subject guides
Databases
Referencing
Catalogue
Articles Plus
Keyword
Title
Author
Subject
Find
Advanced Search
Search Results - Meliorisz, B.
Search Results - Meliorisz, B.
Showing
1 - 3
results of
3
Refine Results
Sort
Relevance
Date Descending
Author
Title
1
Loading…
Computational algorithms for optimizing mask layouts in proximity printing
by
Motzek, K.
,
Vogler, U.
,
Hennemeyer, M.
,
Hornung, M.
,
Voelkel, R.
,
Erdmann, A.
,
Meliorisz, B.
Published in
Microelectronic engineering
Get full text
Items that this one cites
Items that cite this one
Article
Save to List
Saved in:
2
Loading…
Optimization of illumination pupils and mask structures for proximity printing
by
Motzek, K.
,
Bich, A.
,
Erdmann, A.
,
Hornung, M.
,
Hennemeyer, M.
,
Meliorisz, B.
,
Hofmann, U.
,
Ünal, N.
,
Voelkel, R.
,
Partel, S.
,
Hudek, P.
Published in
Microelectronic engineering
Get full text
Items that this one cites
Items that cite this one
Article
Save to List
Saved in:
3
Loading…
Investigation of high-resolution contact printing
by
Meliorisz, B.
,
Partel, S.
,
Schnattinger, T.
,
Fühner, T.
,
Erdmann, A.
,
Hudek, P.
Published in
Microelectronic engineering
Get full text
Items that this one cites
Items that cite this one
Article
Save to List
Saved in:
Search Tools:
RSS Feed
Email Search
Save Search
Back
Refine Results
Page will reload when a filter is selected or excluded.
Limit To
Peer Reviewed
3 results
3
Full Text
3 results
3
Format
Articles
3 results
3
Journal Title
Microelectronic Engineering
3 results
3
Subjects
Applied Sciences
3 results
3
Electronics
3 results
3
Engineering
3 results
3
Engineering, Electrical & Electronic
3 results
3
Exact Sciences And Technology
3 results
3
Microelectronic Fabrication
3 results
3
Nanoscience & Nanotechnology
3 results
3
Optics
3 results
3
Physical Sciences
3 results
3
Physics
3 results
3
Physics, Applied
3 results
3
Science & Technology
3 results
3
Science & Technology - Other Topics
3 results
3
Semiconductor Electronics. Microelectronics. Optoelectronics. Solid State Devices
3 results
3
Technology
3 results
3
Fundamental Areas Of Phenomenology
2 results
2
Mask Aligner
2 results
2
Masks
2 results
2
Mathematical Models
2 results
2
Mo Exposure Optics
2 results
2
Year of Publication
From:
To:
Source
Sciencedirect
3 results
3
Sciencedirect Journals
3 results
3
Backfile Package - Computer Science (Legacy) [Ycs]
3 results
3
Elsevier Sd Backfile Engineering And Technology
3 results
3
Sciencedirect - Materials Science Backfile Journals
3 results
3
Elsevier Sd Backfile Physics
3 results
3