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    Mechanisms of Chemical-Mechanical Polishing of SiO2 Dielectric on Integrated Circuits

    Mechanisms of Chemical-Mechanical Polishing of SiO2 Dielectric on Integrated Circuits by Levert, Joseph A., Mess, Francis M., Salant, Richard F., Danyluk, Steven, Baker, A. Richard

    Published in Tribology transactions
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    Mechanisms of Chemical-Mechanical Polishing of SiO 2 Dielectric on Integrated Circuits

    Mechanisms of Chemical-Mechanical Polishing of SiO 2 Dielectric on Integrated Circuits by Levert, Joseph A., Mess, Francis M., Salant, Richard F., Danyluk, Steven, Baker, A. Richard

    Published in Tribology transactions
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