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    An atomic layer deposition chamber for in situ x-ray diffraction and scattering analysis

    An atomic layer deposition chamber for in situ x-ray diffraction and scattering analysis by Geyer, Scott M, Methaapanon, Rungthiwa, Johnson, Richard W, Kim, Woo-Hee, Van Campen, Douglas G, Metha, Apurva, Bent, Stacey F

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