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Search Results - Miakonkih, A V
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Planar betavoltaic converter creation with plasma-immersion ion implantation process
by
Rudenko, K V
,
Miakonkih, A V
,
Rogojin, A E
,
Bogdanov, S V
,
Sidorov, V G
,
Zelenkov, P V
Published in
IOP conference series. Materials Science and Engineering
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Plasma chemical silicon etching process
by
Rudenko, K V
,
Miakonkih, A V
,
Rogojin, A E
,
Bogdanov, S V
,
Sidorov, V G
,
Kovalev, I V
Published in
IOP conference series. Materials Science and Engineering
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Iop Conference Series. Materials Science And Engineering
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Iop Conference Series: Materials Science And Engineering
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Betavoltaic Element
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Materials Science
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P-I-N Diode
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Converters
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Cryo Process
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Cryoforming
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Diodes
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Electric Potential
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Etching
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High Aspect Ratio
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Ion Implantation
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Leakage Current
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Plasma-Immersion Ion Implantation
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Scalloping
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Silicon
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Submerging
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Voltage
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