Search Results - Michallon, Philippe

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  1. 1
    Disturbance Effects in Extreme Ultraviolet Interferometric Lithography Affecting Interference Fringes

    Disturbance Effects in Extreme Ultraviolet Interferometric Lithography Affecting Interference Fringes by Saib, Mohamed, Constancias, Christophe, Michallon, Philippe, Dalzotto, Bernard, Besacier, Maxime

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  2. 2
    PECVD, RF vs Dual Frequency: investigation of plasma influence on metalorganic precursors decomposition and material characteristics

    PECVD, RF vs Dual Frequency: investigation of plasma influence on metalorganic precursors decomposition and material characteristics by Piallat, Fabien, Vallée, Christophe, Gassilloud, Rémy, Michallon, Philippe, Pélissier, Bernard, Caubet, Pierre

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  3. 3
    Evaluation of plasma parameters on PEALD deposited TaCN

    Evaluation of plasma parameters on PEALD deposited TaCN by Piallat, Fabien, Beugin, Virginie, Gassilloud, Remy, Michallon, Philippe, Dussault, Laurent, Pelissier, Bernard, Asikainen, Timo, Maes, Jan Willem, Martin, François, Morin, Pierre, Vallée, Christophe

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  4. 4
    Plasma Enhanced Chemical Vapor Deposition of Conformal GeTe Layer for Phase Change Memory Applications

    Plasma Enhanced Chemical Vapor Deposition of Conformal GeTe Layer for Phase Change Memory Applications by Gourvest, Emmanuel, Vallée, Christophe, Michallon, Philippe, Blanc, Romuald, Tiron, Raluca, Jourde, Dominique, Lhostis, Sandrine, Maitrejean, Sylvain

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  5. 5
    Optical Simulation of Multijunction Solar Cells Based on III-V Nanowires on Silicon

    Optical Simulation of Multijunction Solar Cells Based on III-V Nanowires on Silicon by Benali, Abdennacer, Michallon, Jérôme, Regreny, Philippe, Drouard, Emmanuel, Rojo, Pedro, Chauvin, Nicolas, Bucci, Davide, Fave, Alain, Kaminski-Cachopo, Anne, Gendry, Michel

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