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Search Results - Micron Technology Inc., Boise, ID 83707
Search Results - Micron Technology Inc., Boise, ID 83707
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Plasma chemistry study of PLAD processes
by
Qin Shu
,
Brumfield, Kyle
,
Liu, Lequn Jennifer
,
Hu, Yongjun Jeff
,
McTeer, Allen
,
Hsu, Wei Hui
,
Wang Maoying
,
Micron Technology Inc., Boise, ID 83707
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Conference Proceeding
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Plasma process optimization for N-type doping applications
by
Raj, Deven
,
Persing, Harold
,
Salimian, Siamak
,
Lacey, Kerry
,
Qin Shu
,
Hu, Jeff Y.
,
McTeer, Allen
,
Micron Technology, Inc., 8000 S. Federal Way, Boise, ID 83707
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Conference Proceeding
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B2H6 PLAD Doped PMOS Device Performance
by
Fang, Z
,
Miller, T
,
Winder, E
,
Persing, H
,
Arevalo, E
,
Gupta, A
,
Parrill, T
,
Singh, V
,
Qin, S
,
McTeer, A
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AIP conference proceedings
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