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    On the Formation of Black Silicon Features by Plasma-Less Etching of Silicon in Molecular Fluorine Gas

    On the Formation of Black Silicon Features by Plasma-Less Etching of Silicon in Molecular Fluorine Gas by Kafle, Bishal, Ridoy, Ahmed, Miethig, Eleni, Clochard, Laurent, Duffy, Edward, Hofmann, Marc, Rentsch, Jochen

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