Search Results - Mikkhailov, Yu. A.

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    The optimization of parameters of deep plasma chemical etching of silicon for the elements of microelectromechanic systems

    The optimization of parameters of deep plasma chemical etching of silicon for the elements of microelectromechanic systems by Vinogradov, A. I., Zaryankin, N. M., Prokop’ev, E. P., Timoshenkov, S. P., Mikkhailov, Yu. A.

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