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Revolutionary and evolutionary resist design concepts for 193 nm lithography
by
Nalamasu, O.
,
Wallow, T.I.
,
Reichmanis, E.
,
Novembre, A.E.
,
Houlihan, F.M.
,
Dabbagh, G.
,
Mixon, D.A.
,
Hutton, R.S.
,
Timko, A.G.
,
Wood, O.R.
,
Cirelli, R.A.
Published in
Microelectronic engineering
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Copolymerization of t-butoxycarbonyloxystyrene and sulfur dioxide
by
Bohrer, Michael P.
,
Mixon, David A.
Published in
Polymer engineering and science
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Ultrapurification of SiCl4 by photochlorination in a bubble column reactor
by
Mixon, David A.
,
Bohrer, Michael P.
,
O'Hara, Patricia A.
Published in
AIChE journal
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