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Irradiation of silicon surface by Ar cluster ion beam: Cluster size effects
by
Nakayama, Y.
,
Houzumi, S.
,
Toyoda, N.
,
Mochji, K.
,
Mitamura, T.
,
Yamada, I.
Published in
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms
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Positive charge generation at a SiO2/Si interface due to bombardment with metastable atoms
by
ONO, T
,
ITABASHI, N
,
OCHIAI, I
,
YAMAMOTO, S
,
MOCHIJI, K
Published in
Japanese journal of applied physics
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Journal Title
Japanese Journal Of Applied Physics
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Japanese Journal Of Applied Physics Part 1-Regular Papers Short Notes & Review Papers
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Japanese Journal Of Applied Physics, Part 1: Regular Papers And Short Notes And Review Papers
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Nuclear Instruments & Methods In Physics Research. Section B, Beam Interactions With Materials And Atoms
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Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms
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Subjects
Physical Sciences
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Physics
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Science & Technology
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Applied Sciences
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Cluster Size
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Damage
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Damage Formation
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Electronics
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Exact Sciences And Technology
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Gcib
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Instrumentation
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Instruments & Instrumentation
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Metastable Atom
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Microelectronic Fabrication
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Nuclear And High Energy Physics
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Nuclear Science & Technology
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Physics, Applied
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Physics, Atomic, Molecular & Chemical
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Physics, Nuclear
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Plasma
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Sciencedirect - Connect Here First To Enable Access
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Elsevier
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Institute Of Physics Iop Science Extra
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