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Evaluation of Barrier CMP Slurries and Characterization of ULK Material Properties Shifts Due to CMP
by
Tseng, Wei-Tsu
,
Kioussis, Dimitri
,
Manikonda, Shravanthi L.
,
Kim, Hyun-Ki
,
Choi, Jihong
,
Zhao, Feng
,
Economikos, Laertis
,
Klymko, Nancy
,
Chace, Mark
,
Molis, Steve
,
Chae, Moosung
,
Engbrecht, Edward
,
Zielinski, Eden
,
Truong, Connie
,
Watts, David
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Post Implant Strip Optimization for 90nm and Beyond Technologies
by
Fuller, N.C.M.
,
Santiago, A.
,
Mello, K.
,
Chienfan Yu
,
Molis, S.
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Ultrathin (5-35 nm) SiCNH Dielectrics for Damascene Cu Cap Application: Thickness Scaling and Oxidation Barrier Performance Limitation
by
Nguyen, Son V.
,
Haigh, Thomas
,
Shaw, Thomas
,
Molis, Steven
,
Dziobkowski, Chet
,
Zahakos, C.
,
Cohen, Steve
,
Shobha, Hosadurga
,
Liniger, E.
,
Hu, C. K.
,
Bonilla, Griselda
,
Klymko, Nancy
,
Grill, Alfred
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Market: Lawyers, FA Should Have Averted Refunding Meltdown
by
Goldsmith, Steve
,
Molis, Jim
Published in
The Bond buyer (New York, N.Y. 1982)
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