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Copper Oxide Films Grown by Atomic Layer Deposition from Bis(tri-n-butylphosphane)copper(I)acetylacetonate on Ta, TaN, Ru, and SiO[sub 2]
by
Waechtler, Thomas
,
Oswald, Steffen
,
Roth, Nina
,
Jakob, Alexander
,
Lang, Heinrich
,
Ecke, Ramona
,
Schulz, Stefan E.
,
Gessner, Thomas
,
Moskvinova, Anastasia
,
Schulze, Steffen
,
Hietschold, Michael
Published in
Journal of the Electrochemical Society
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