Void-free upper cladding deposition process for low-loss integrated silicon nitride photonics by Mumlyakov, Alexandr M., Dmitriev, Nikita Yu, Shibalov, Maksim V., Filippov, Ivan A., Trofimov, Igor V., Danilin, Andrei N., Lobanov, Valery E., Bilenko, Igor A., Tarkhov, Michael A.

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