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Characterization of titanium nitride layers by grazing-emission X-ray fluorescence spectrometry
by
Wiener, G.
,
Kidd, S.J.
,
Mutsaers, C.A.H.
,
Wolters, R.A.M.
,
de Bokx, P.K.
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Applied surface science
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Chemical mechanical polishing of aluminum for the 0.18 /spl mu/m dual damascene process
by
Kordic, S.
,
Mutsaers, C.A.H.
,
Lifka, H.
,
Webster, M.N.
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Applied Surface Science
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