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Direct patterning in ZnO film formation by surface discharge technique
by
Okuya, Masayuki
,
Nabeta, Keigo
,
Shibayama, Yoshihiro
,
Kanezashi, Shota
,
Tan, Masato
,
Iyoda, Masahiko
,
Shikatani, Masahiro
,
Sonohara, Yosuke
,
Yagi, Isao
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Applied physics express
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