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A simple non-recessed and Au-free high quality Ohmic contacts on AlGaN/GaN: The case of Ti/Al alloy
by
El-zammar, Georgio
,
Yvon, Arnaud
,
Khalfaoui, Wahid
,
Nafouti, Maher
,
Cayrel, Frederic
,
Collard, Emmanuel
,
Alquier, Daniel
Published in
Materials science in semiconductor processing
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Materials Science In Semiconductor Processing
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Alloy Formation
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Contact Resistance
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Gan
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Ohmic Contacts
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