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Characterization of bonding activation sequences to enable ultra-low Cu/SiCN wafer level hybrid bonding
by
Iacovo, Serena
,
Peng, Lan
,
Nagano, Fuya
,
Uhrmann, Thomas
,
Burggraf, Jurgen
,
Fehkuhrer, Andreas
,
Conard, Thierry
,
Inoue, Fumihiro
,
Kim, Soon-Wook
,
De Vos, Joeri
,
Phommahaxay, Alain
,
Beyne, Eric
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Characterization of Silicon Carbon Nitride for Low Temperature Wafer-to-Wafer Direct Bonding
by
Nagano, Fuya
,
Iacovo, Serena
,
Phommahaxay, Alain
,
Inoue, Fumihiro
,
Sleeckx, Erik
,
De Gendt, Stefan
,
Beyer, Gerald
,
Beyne, Eric
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Direct Bonding Using Low Temperature SiCN Dielectrics
by
Iacovo, Serena
,
Nagano, Fuya
,
Channam, Venkat Sunil Kumar
,
Walsby, Edward
,
Crook, Kath
,
Buchanan, Keith
,
Jourdain, Anne
,
Vanstreels, Kris
,
Phommahaxay, Alain
,
Beyne, Eric
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Growth rate of IMC in the binary sytems of Co/Sn and Cu/Sn
by
Nagano, Fuya
,
Kajihara, Masanori
,
Derakhshandeh, Jaber
,
Hou, Lin
,
Van De Peer, Myriam
,
De Preter, Inge
,
Sharifi, Shamin Houshmand
,
Rebibis, Kenneth June
,
Miller, Andy
,
Beyer, Gerald
,
Beyne, Eric
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3D stacking cobalt and nickel microbumps and kinetics of corresponding IMCs at low temperatures
by
De Preter, Inge
,
Derakhshandeh, Jaber
,
Nagano, Fuya
,
Sharifi, Shamin Houshmand
,
Hou, Lin
,
Bex, Pieter
,
Suhard, Samuel
,
Shibata, Toshiaki
,
Oda, Yukinori
,
Hashimoto, Shigeo
,
Lieten, Ruben
,
Rebibis, Kenneth June
,
Miller, Andy
,
Beyer, Gerald
,
Beyne, Eric
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Conference Proceedings
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Ecs Transactions
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Subjects
Engineering
4 results
4
Engineering, Electrical & Electronic
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4
Science & Technology
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4
Technology
4 results
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Bonding
3 results
3
Aging
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2
Annealing
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Bonding Strength
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Cobalt
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Dielectrics
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Electronic Components
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Silicon Carbonitride
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Three-Dimensional Displays
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Activation Energy
1 results
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Chemical Vapor Deposition
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Citric Acid
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Cleaning
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Co/Sn
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Component
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