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    Scatterometry for optimization of injection molded nanostructures at the fabrication line

    Scatterometry for optimization of injection molded nanostructures at the fabrication line by Madsen, Jonas Skovlund, Jensen, Søren Alkærsig, Nakotte, Lars, Vogelsang, Arne, Thamdrup, Lasse Højlund, Czolkos, Ilja, Johansson, Alicia, Garnæs, Jørgen, Nielsen, Theodor, Nygård, Jesper, Hansen, Poul Erik

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