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    Atomic layer deposition of Ru films from bis(2,5-dimethylpyrrolyl)ruthenium and oxygen

    Atomic layer deposition of Ru films from bis(2,5-dimethylpyrrolyl)ruthenium and oxygen by Kukli, Kaupo, Aarik, Jaan, Aidla, Aleks, Jõgi, Indrek, Arroval, Tõnis, Lu, Jun, Sajavaara, Timo, Laitinen, Mikko, Kiisler, Alma-Asta, Ritala, Mikko, Leskelä, Markku, Peck, John, Natwora, Jim, Geary, Joan, Spohn, Ronald, Meiere, Scott, Thompson, David M.

    Published in Thin solid films
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