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    Process dependence of the piezoelectric response of membrane actuators based on Pb(Zr0.45Ti0.55)O3 thin films

    Process dependence of the piezoelectric response of membrane actuators based on Pb(Zr0.45Ti0.55)O3 thin films by Nguyen, C.T.Q., Nguyen, M.D., Dekkers, M., Houwman, E., Vu, H.N., Rijnders, G.

    Published in Thin solid films
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