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Fin Doping by Hot Implant for 14nm FinFET Technology and Beyond
by
Wood, Bingxi Sun
,
Khaja, Fareen Adeni
,
Colombeau, Benjamin P
,
Sun, Shiyu
,
Waite, Andrew
,
Jin, Miao
,
Chen, Hao
,
Chan, Osbert
,
Thanigaivelan, Thirumal
,
Pradhan, Nilay
,
Gossmann, Hans-Joachim L
,
Sharma, Shashank
,
Chavva, Venkataramana R
,
Cai, Man-Ping
,
Okazaki, Motoya
,
Munnangi, Samuel Swaroop
,
Ni, Chi-Nung
,
Suen, Wesley
,
Chang, Chorng-Ping
,
Mayur, Abhilash
,
Variam, Naushad
,
Brand, Adam D
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ECS transactions
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3D MOSCAP Vehicle for Electrical Characterization of Sidewall Dielectrics for 3D Monolithic Integration
by
Wood, Bingxi
,
McDougall, Brendan
,
Chan, Osbert
,
Dent, Alan
,
Ni, Chi-Nung
,
Hung, Raymond
,
Chen, Hao
,
Xu, Ping
,
Nguyen, Phong
,
Okazaki, Motoya
,
Mao, Daxin
,
Xu, Xumou
,
Ramiraz, Ricardo
,
Cai, Man-Ping
,
Jin, Miao
,
Lee, Won
,
Noori, Atif
,
Shek, Meiyee
,
Chang, Chorng-Ping
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Conference Proceeding
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Electrochemistry
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Institute Of Physics
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Institute Of Physics Iopscience Extra
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