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Search Results - Niesel, Thalke
Search Results - Niesel, Thalke
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Micro-clamps for precise positioning of 120° silicon double mirrors in a MOEMS gyroscope
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Niesel, Thalke
,
Dietzel, Andreas
Published in
Microelectronic engineering
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Fabrication of 120° silicon double mirrors robust against misalignment for use in micro optical gyroscopes
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Niesel, Thalke
,
Dietzel, Andreas
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Microelectronic engineering
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Fabrication of 120° silicon double mirrors robust against misalignment for use in micro optical gyroscopes: Nano Fabrication 2013
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NIESEL, Thalke
,
DIETZEL, Andreas
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Microelectronic engineering
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Optical resonator formed with etched silicon micromirrors
by
Leber, Ingmar
,
Werner, Christian
,
Yu, Liang
,
Niesel, Thalke
,
Flügge, Jens
,
Dietzel, Andreas
Published in
Optical engineering
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A novel approach to realize the local precise variotherm process in micro injection molding
by
Xie, Lei
,
Niesel, Thalke
,
Leester-Schädel, Monika
,
Ziegmann, Gerhard
,
Büttgenbach, Stephanus
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Microsystem technologies : sensors, actuators, systems integration
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Microelectronic Engineering
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Microsystem Technologies : Sensors, Actuators, Systems Integration
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Optical Gyroscope
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Moems
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Etching
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