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Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li3PO4 Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge
by
Gavrilov, Nikolay
,
Kamenetskikh, Alexander
,
Tretnikov, Petr
,
Nikonov, Alexey
,
Sinelnikov, Leonid
,
Butakov, Denis
,
Nikolkin, Viktor
,
Chukin, Andrey
Published in
Membranes (Basel)
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Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li 3 PO 4 Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge
by
Gavrilov, Nikolay
,
Kamenetskikh, Alexander
,
Tretnikov, Petr
,
Nikonov, Alexey
,
Sinelnikov, Leonid
,
Butakov, Denis
,
Nikolkin, Viktor
,
Chukin, Andrey
Published in
Membranes (Basel)
Get full text
Article
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Journal Title
Membranes
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Subjects
Anodic Evaporation
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Biochemistry & Molecular Biology
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Chemistry
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Chemistry, Physical
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Conductivity
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Crystallization
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Deposition
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Discharge
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Electric Arcs
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Electrodes
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Engineering
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Engineering, Chemical
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Evaporation
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Evaporation Rate
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Heating
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Hollow Cathodes
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Ion Currents
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Life Sciences & Biomedicine
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Lipon Thin Films
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Lithium
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