Search Results - Nikulski, R.

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  1. 1
    Growth of cubic boron nitride and boron-carbon-nitrogen coatings using N-trimethylborazine in an electron cyclotron resonance plasma process

    Growth of cubic boron nitride and boron-carbon-nitrogen coatings using N-trimethylborazine in an electron cyclotron resonance plasma process by Weber, A., Bringmann, U., Nikulski, R., Klages, C.-P.

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  2. 2
    Electron cyclotron resonance plasma deposition of cubic boron nitride using N-trimethylborazine

    Electron cyclotron resonance plasma deposition of cubic boron nitride using N-trimethylborazine by Weber, A., Bringmann, U., Nikulski, R., Klages, C.-P.

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  3. 3
    Low temperature deposition of TiN using tetrakis(dimethylamido)-titanium in an electron cyclotron resonance plasma process

    Low temperature deposition of TiN using tetrakis(dimethylamido)-titanium in an electron cyclotron resonance plasma process by WEBER, A, NIKULSKI, R, KLAGES, C.-P, GROSS, M. E, BROWN, W. L, DONS, E, CHARATAN, R. M

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  4. 4
    Deposition of TiN using tetrakis(dimethylamido)-titanium in an electron-cyclotron-resonance plasma process

    Deposition of TiN using tetrakis(dimethylamido)-titanium in an electron-cyclotron-resonance plasma process by WEBER, A, NIKULSKI, R, KLAGES, C.-P

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  5. 5
    Aspects of TiN and Ti deposition in an ECR plasma enhanced CVD process

    Aspects of TiN and Ti deposition in an ECR plasma enhanced CVD process by Weber, A., Nikulski, R., Klages, C.-P., Gross, M.E., Charatan, R.M., Opilan, R.L., Brown, W.L.

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  6. 6
    Low-temperature deposition of TiN using tetrakis(dimethylamido)-titanium in an electron cyclotron resonance process

    Low-temperature deposition of TiN using tetrakis(dimethylamido)-titanium in an electron cyclotron resonance process by Weber, A, Nikulski, R, Klages, C-P

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