Fabrication of non-underetched convex corners in anisotropic etching of (100)-silicon in aqueous KOH with respect to novel micromechanic elements by MAYER, G. K, OFFEREINS, H. L, SANDMAIER, H, KÜHL, K

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Amorphous silicon carbide and its application in silicon micromachining by Klumpp, A., Schaber, U., Offereins, H.L., Kühl, K., Sandmaier, H.

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CAD tools for micromechanics by Sandmaier, H, Offereins, H L, Folkmer, B

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A monolithically integrated sensor system using sensor-specific CMOS cells by Weber, J., Seitz, S., Steger, U., Folkmer, B., Schaber, U., Plettner, A., Offereins, H.L., Sandmeier, H., Lindner, E.

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A simulation tool for mechanical sensor design by Folkmer, B., Offereins, H.L., Sandmaier, H., Lang, W., Seidl, A., Groth, P., Pressmar, R.

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Methods for the fabrication of convex corners in anisotropic etching of (100) silicon in aqueous KOH by Offereins, H.L., Kühl, K., Sandmaier, H.

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Stress free assembly technique for a silicon based pressure sensor by Offereins, H.L., Sandmaier, H., Folkmer, B., Steger, U., Lang, W.

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The added value of a new high-performance ring-gantry CBCT imaging system for prostate cancer patients by Kunnen, Britt, J.A.J. van de Schoot, Agustinus, Fremeijer, Kimm P., Nicolai-Koornneef, Elise M., Offereins-van Harten, Kirsten, Sluijter, Judith H., Sijtsema, Nienke D., Oomen-de Hoop, Esther, el Yaakoubi, Abdelmounaim, Froklage, Femke E., de Vries, Kim C., Dirkx, Maarten L.P., Penninkhof, Joan J., Petit, Steven F.

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