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Diagonal phase errors affecting optical intensity in phase defect repair elements
by
OHTSUKU, H
,
KUWAHARA, K
,
ONODERA, T
Published in
Japanese Journal of Applied Physics
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Japanese Journal Of Applied Physics
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Japanese Journal Of Applied Physics Part 1-Regular Papers Short Notes & Review Papers
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Subjects
Absorbent Refilling Film
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Applied Sciences
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Diagonal Phase Error
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Electronics
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Exact Sciences And Technology
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Fib Process
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General Engineering
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General Physics And Astronomy
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Geometric Size Effect
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Intermediate Phase
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Microelectronic Fabrication
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Phase Defect
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Phase Shift Method
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Phase Step
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Physical Sciences
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Physics
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Physics, Applied
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Science & Technology
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Semiconductor Electronics. Microelectronics. Optoelectronics. Solid State Devices
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Institute Of Physics
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