Comparison of Langmuir probe and multipole resonance probe measurements in argon, hydrogen, nitrogen, and oxygen mixtures in a double ICP discharge by Fiebrandt, Marcel, Oberberg, Moritz, Awakowicz, Peter

Get full text

The Planar Multipole Resonance Probe: A Minimally Invasive Monitoring Concept for Plasma-Assisted Dielectric Deposition Processes by Pohle, Dennis, Schulz, Christian, Oberberg, Moritz, Awakowicz, Peter, Rolfes, Ilona

Get full text

Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the µ-mode by Eremin, Denis, Engel, Dennis, Krüger, Dennis, Wilczek, Sebastian, Berger, Birk, Oberberg, Moritz, Wölfel, Christian, Smolyakov, Andrei, Lunze, Jan, Awakowicz, Peter, Schulze, Julian, Brinkmann, Ralf Peter

Get full text

Diagnostics of Plasma Processes Based on Parallelized Spatially Resolved In-Situ Reflection Measurements by Schulz, Christian, Runkel, Jan, Oberberg, Moritz, Awakowicz, Peter, Rolfes, Ilona

Get full text

On the Multipole Resonance Probe: Current Status of Research and Development by Oberrath, Jens, Friedrichs, Michael, Gong, Junbo, Oberberg, Moritz, Pohle, Dennis, Schulz, Christian, Wang, Chunjie, Awakowicz, Peter, Brinkmann, Ralf Peter, Lapke, Martin, Mussenbrock, Thomas, Musch, Thomas, Rolfes, Ilona

Get full text

Control-oriented plasma modeling and controller design for reactive sputtering by Woelfel, Christian, Oberberg, Moritz, Berger, Birk, Engel, Dennis, Brinkmann, Ralf Peter, Schulze, Julian, Awakowicz, Peter, Lunze, Jan

Get full text

Improved homogeneity of plasma and coating properties using a lance matrix gas distribution in MW-PECVD by Kirchheim, Dennis, Wilski, Stefan, Jaritz, Montgomery, Mitschker, Felix, Oberberg, Moritz, Trieschmann, Jan, Banko, Lars, Brochhagen, Markus, Schreckenberg, Rabea, Hopmann, Christian, Böke, Marc, Benedikt, Jan, de los Arcos, Teresa, Grundmeier, Guido, Grochla, Dario, Ludwig, Alfred, Mussenbrock, Thomas, Brinkmann, Ralf Peter, Awakowicz, Peter, Dahlmann, Rainer

Get full text

Electron dynamics in planar radio frequency magnetron plasmas: III. Comparison of experimental investigations of power absorption dynamics to simulation results by Berger, Birk, Eremin, Denis, Oberberg, Moritz, Engel, Dennis, Wölfel, Christian, Zhang, Quan-Zhi, Awakowicz, Peter, Lunze, Jan, Brinkmann, Ralf Peter, Schulze, Julian

Get full text

Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the {\mu}-mode by Eremin, Denis, Engel, Dennis, Krüger, Dennis, Wilczek, Sebastian, Berger, Birk, Oberberg, Moritz, Wölfel, Christian, Smolyakov, Andrei, Lunze, Jan, Awakowicz, Peter, Schulze, Julian, Brinkmann, Ralf Peter

Get full text

Process diagnostics in PIAD: tracing plasma fluctuations and drifts by Malobabic, Sina, Harhausen, Jens, Oberberg, Moritz, Foest, Rüdiger, Mechold, Lars, Awakowicz, Peter, Brinkmann, Ralf Peter

Get full text