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Halide Vapor Phase Epitaxy of In2O3 and (In1−xGax)2O3 on Sapphire Substrates and GaN/Al2O3 Templates
by
Stepanov, Sergey
,
Nikolaev, Vladimir
,
Pechnikov, Alexei
,
Scheglov, Mikhail
,
Chikiryaka, Andrei
,
Chernykh, Alexey
,
Odnobludov, Maxim
,
Andreeva, Valentina
,
Polyakov, Alexander Y.
Published in
Physica status solidi. A, Applications and materials science
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Halide Vapor Phase Epitaxy of In 2 O 3 and (In 1− x Ga x ) 2 O 3 on Sapphire Substrates and GaN/Al 2 O 3 Templates
by
Stepanov, Sergey
,
Nikolaev, Vladimir
,
Pechnikov, Alexei
,
Scheglov, Mikhail
,
Chikiryaka, Andrei
,
Chernykh, Alexey
,
Odnobludov, Maxim
,
Andreeva, Valentina
,
Polyakov, Alexander Y.
Published in
Physica status solidi. A, Applications and materials science
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Journal Title
Physica Status Solidi. A, Applications And Materials Science
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Physica Status Solidi
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Subjects
2O3
1 results
1
Aluminum Oxide
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1
Chlorides
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1
Corundum
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1
Epitaxial Growth
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1
Epitaxies
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1
Gallium Nitrides
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1
Gallium Oxides
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Halide Vapor Phase Epitaxy
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In
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In2O3
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1
Indium Oxide
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Indium Oxides
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Metalorganic Chemical Vapor Deposition
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Organic Chemicals
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Organic Chemistry
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Sapphire
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Substrates
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Vapor Phase Epitaxy
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Vapor Phases
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Wiley Online Library
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Wiley
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