Search Results - Offereins, H.L.

  • Showing 1 - 6 results of 6
Refine Results
  1. 1
    Methods for the fabrication of convex corners in anisotropic etching of (100) silicon in aqueous KOH

    Methods for the fabrication of convex corners in anisotropic etching of (100) silicon in aqueous KOH by Offereins, H.L., Kühl, K., Sandmaier, H.

    Get full text
    Items that this one cites
    Items that cite this one
    Article
    Save to List
    Saved in:
  2. 2
    Amorphous silicon carbide and its application in silicon micromachining

    Amorphous silicon carbide and its application in silicon micromachining by Klumpp, A., Schaber, U., Offereins, H.L., Kühl, K., Sandmaier, H.

    Get full text
    Items that this one cites
    Items that cite this one
    Article
    Save to List
    Saved in:
  3. 3
    Corner compensation techniques in anisotropic etching of

    Corner compensation techniques in anisotropic etching of by Sandmaier, H., Offereins, H.L., Kuhl, K., Lang, W.

    Request full text
    Conference Proceeding
    Save to List
    Saved in:
  4. 4
    A monolithically integrated sensor system using sensor-specific CMOS cells

    A monolithically integrated sensor system using sensor-specific CMOS cells by Weber, J., Seitz, S., Steger, U., Folkmer, B., Schaber, U., Plettner, A., Offereins, H.L., Sandmeier, H., Lindner, E.

    Get full text
    Items that this one cites
    Items that cite this one
    Article
    Save to List
    Saved in:
  5. 5
    A simulation tool for mechanical sensor design

    A simulation tool for mechanical sensor design by Folkmer, B., Offereins, H.L., Sandmaier, H., Lang, W., Seidl, A., Groth, P., Pressmar, R.

    Get full text
    Items that this one cites
    Items that cite this one
    Article
    Save to List
    Saved in:
  6. 6
    Stress free assembly technique for a silicon based pressure sensor

    Stress free assembly technique for a silicon based pressure sensor by Offereins, H.L., Sandmaier, H., Folkmer, B., Steger, U., Lang, W.

    Request full text
    Conference Proceeding
    Save to List
    Saved in:

Search Tools: