Search Results - Oh, Myeonghun

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    Investigation on Particle Generation Mechanism during Dichlorosilane-Based WSi Deposition Process

    Investigation on Particle Generation Mechanism during Dichlorosilane-Based WSi Deposition Process by Oh, Myeonghun, Kim, Jaungjoo, Kim, Jinsung, Yang, Jichul, Lee, Soocheol, Kim, Taesung

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  2. 2
    Investigation on the control of silicon whisker generation during dichlorosilane-based WSi deposition process

    Investigation on the control of silicon whisker generation during dichlorosilane-based WSi deposition process by Choi, Hoomi, Oh, Myeonghun, Kim, Jinsung, Kim, Jaungjoo, Yang, Ji Chul, Lee, Soochul, Lee, Sang Won, Kim, Taesung

    Published in Thin solid films
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