Search Results - Oh, Shinil

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    Effect of radial grooves pads on copper chemical mechanical polishing

    Effect of radial grooves pads on copper chemical mechanical polishing by Bae, Chulwoo, Oh, Shinil, Kim, Juhwan, Kwak, Donggeon, Oh, Seungjun, Kim, Taesung

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    Investigating the Impact of Pad Groove Depth Reduction on Process Variation in Oxide Chemical Mechanical Polishing

    Investigating the Impact of Pad Groove Depth Reduction on Process Variation in Oxide Chemical Mechanical Polishing by Liu, Pengzhan, Kang, Chul, Oh, Shinil, Jeon, Sanghuck, Lee, Hyeonjeong, Wang, Ziyang, Jeong, Hyunjin, Lee, Euihaeng, Kim, TaeSung

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