Search Results - Ohgawara, Shoji

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  1. 1
    Effects of Nitrogen Addition to Microwave Oxygen Plasma in Surface Wave with Disk-Plate Window and Photoresist Ashing

    Effects of Nitrogen Addition to Microwave Oxygen Plasma in Surface Wave with Disk-Plate Window and Photoresist Ashing by Shinagawa, Keisuke, Yamamoto, Jin, Ohgawara, Shoji, Zaima, Shigeaki, Furukawa, Masakazu

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  2. 2
    Properties of Low-k Copper Barrier SiOCH Film Deposited by PECVD Using Hexamethyldisiloxane and N[sub 2]O

    Properties of Low-k Copper Barrier SiOCH Film Deposited by PECVD Using Hexamethyldisiloxane and N[sub 2]O by Ishimaru, Tomomi, Shioya, Yoshimi, Ikakura, Hiroshi, Nozawa, Mamoru, Ohgawara, Shoji, Ohdaira, Toshiyuki, Suzuki, Ryoichi, Maeda, Kazuo

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  3. 3
    Properties of low-k copper barrier SiOCH film deposited by PECVD using hexamethyldisiloxane and N2O

    Properties of low-k copper barrier SiOCH film deposited by PECVD using hexamethyldisiloxane and N2O by ISHIMARU, Tomomi, SHIOYA, Yoshimi, IKAKURA, Hiroshi, NOZAWA, Mamoru, OHGAWARA, Shoji, OHDAIRA, Toshiyuki, SUZUKI, Ryoichi, MAEDA, Kazuo

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  4. 4
    Comparison of Deposition Characteristics between Triethyl and Trimethyl Borates in an Atmospheric Pressure Chemical Vapor Deposition Equipment with Tetraethyl Orthosilicate and O 3

    Comparison of Deposition Characteristics between Triethyl and Trimethyl Borates in an Atmospheric Pressure Chemical Vapor Deposition Equipment with Tetraethyl Orthosilicate and O 3 by Yamamoto, Yoshito, Ikakura, Hiroshi, Ohgawara, Shoji, Furukawa, Masakazu

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