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A 32.768 kHz MEMS Resonator with +/-20 ppm Tolerance in 0.9 mm x 0.6 mm Chip Scale Package
by
Kaajakari, Ville
,
Pangaro, Allen
,
Goto, Yuchi
,
Nishimura, Toshio
,
Okawa, Tadayuki
,
Seki, Hitoshi
,
Suzuki, Arata
,
Umeda, Keiichi
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32 Khz
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Automation & Control Systems
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Chip Scale Packaging
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Circuits
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Compensation
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Computer Science
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Computer Science, Information Systems
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Csp
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Dld
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Electrical Engineering
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Engineering
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Engineering, Electrical & Electronic
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Equivalence
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Frequency Control
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Frequency Trimming
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Impedance
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Mems Resonator
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Microcontrollers
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Microelectromechanical Systems
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Micromechanical Devices
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Ieee Electronic Library (Iel) Conference Proceedings
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