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Fabrication of buried InP/InGaAsP waveguide-wires for use in optical beamwidth transformers
by
Kohl, A.
,
Zengerle, R.
,
Brückner, H.J.
,
Olzhausen, H.J.
,
Müller, R.
,
Heime, K.
Published in
Microelectronic engineering
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