Search Results - Oosterlaken, Ed

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  1. 1
    Novel Batch Titanium Nitride CVD Process for Advanced Metal Electrodes

    Novel Batch Titanium Nitride CVD Process for Advanced Metal Electrodes by Zagwijn, Peter M., Verweij, Wilco, Pierreux, Dieter, Adjeroud, Noureddine, Bankras, Radko, Oosterlaken, Ed, Snijders, Gert Jan, Van den Hout, Michiel, Fischer, Pamela, Wilhelm, Rudi, Knapp, Martin

    Published in ECS transactions
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  2. 2
    Low Temperature Silcore® Deposition of Undoped and Doped Silicon Films

    Low Temperature Silcore® Deposition of Undoped and Doped Silicon Films by Fischer, Pamela R., Van Aerde, Steven, Oosterlaken, Ed, Bozon, Bart, Zagwijn, Peter M., Bauer, Matthias, Yan, Min, Verweij, Wilco

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  3. 3
    Radical-Assisted Silcore(R)CVD of Si3N4 and SiO2 Nanolaminates

    Radical-Assisted Silcore(R)CVD of Si3N4 and SiO2 Nanolaminates by Fischer, Pamela R., Oosterlaken, Ed, Bozon, Bart, Zagwijn, Peter M.

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  4. 4
    Advanced manufacturing equipment: a vertical batch furnace for 300-mm wafer processing

    Advanced manufacturing equipment: a vertical batch furnace for 300-mm wafer processing by Hasper, A., Oosterlaken, E., Huussen, F., Claasen-Vujcic, T.

    Published in IEEE MICRO
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