Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries by Nazarov, Denis V., Maximov, Maxim Yu, Novikov, Pavel A., Popovich, Anatoly A., Silin, Aleksey O., Smirnov, Vladimir M., Bobrysheva, Natalia P., Osmolovskaya, Olga M., Osmolovsky, Michail G., Rumyantsev, Aleksandr M.

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