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Electrical and optical characterization of SiONC dielectric thin film deposited by polymer-source chemical vapor deposition
by
Oulachgar, El Hassane
,
Aktik, Cetin
,
Scarlete, Mihai
,
Dostie, Starr
,
Sowerby, Rob
,
Gujrathi, Subhash
Published in
Journal of applied physics
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Fabrication and Characterization of GaAs MOS Capacitor With CVD Grown Polymer-Based Thin Film as a Gate Dielectric
by
Oulachgar, El Hassane
,
Aktik, Cetin
,
Scarlete, Mihai
Published in
IEEE transactions on electron devices
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Ieee Transactions On Electron Devices
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American Institute Of Physics:jisc Collections:transitional Journals Agreement 2021-23 (Reading List)
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Aip 美国物理联合会现刊(与Nstl共建)
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