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    Comparative study of AIN dielectric films' electrical properties for MEMS capacitive switches

    Comparative study of AIN dielectric films' electrical properties for MEMS capacitive switches by KOUTSOURELI, M, ADIKIMENAKIS, A, MICHALAS, L, PAPANDREOU, E, STAVRINIDIS, G, KONSTANTINIDIS, G, GEORGAKILAS, A, PAAIOANNOU, G

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