Search Results - PENTEKER, E

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  1. 1
    Silicon fusion bonding and its characterization

    Silicon fusion bonding and its characterization by Harendt, C, Graf, H G, Hofflinger, B, Penteker, E

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  2. 2
    Wafer fusion bonding and its application to silicon-on-insulator fabrication

    Wafer fusion bonding and its application to silicon-on-insulator fabrication by Harendt, C, Appel, W, Graf, H -G, Hofflinger, B, Penteker, E

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  3. 3
    Wafer bonding for intelligent power ICs: integration of vertical structures

    Wafer bonding for intelligent power ICs: integration of vertical structures by Harendt, C., Wondrak, W., Apel, U., Graf, H.-G., Hofflinger, B., Korec, J., Penteker, E.

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  4. 4
    Silicon-on-insulator films obtained by etchback of bonded wafers

    Silicon-on-insulator films obtained by etchback of bonded wafers by HARENDT, C, APPEL, W, GRAF, H.-G, HÖFFLINGER, B, PENTEKER, E

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  5. 5
    Silicon on insulator material by wafer bonding

    Silicon on insulator material by wafer bonding by HARENDT, C, HUNT, C. E, APPEL, W, GRAF, H.-G, HOÊFFLINGER, B, PENTEKER, E

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