New Silica Removal Technique by Vacuum Heating toward High-Performance Cryosorption Pumps Based on Biomass-Based Activated Carbon by YANAGIHARA, Yuto, MURASE, Takanori, NOTO, Hiroyuki, OGAWA, Kunihiro, SHIMIZU, Akihiro, ISOBE, Mitsutaka, NAGAHARA, Kazuki, TANOUE, Hiroyuki, NAKAGAWA, Sho, HAYASHI, Yuki, PHAM, Ngat T. H., SHIOZAKI, Tomohiro, SOGABE, Toshiaki, NISOA, Mudtorlep

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