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Improved electrical properties using SrTiO3/Y2O3 bilayer dielectrics for MIM capacitor applications
by
KAHN, Maurice
,
VALLEE, Christophe
,
DEFAY, Emmanuel
,
DUBOURDIEU, Catherine
,
BONVALOT, Marceline
,
BLONKOWSKI, Serge
,
PLAUSSU, Jean-Raoul
,
GARREC, Pierre
,
BARON, Thierry
Published in
Microelectronics and reliability
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Improved electrical properties using SrTiO 3/Y 2O 3 bilayer dielectrics for MIM capacitor applications
by
Kahn, Maurice
,
Vallée, Christophe
,
Defay, Emmanuel
,
Dubourdieu, Catherine
,
Bonvalot, Marceline
,
Blonkowski, Serge
,
Plaussu, Jean-Raoul
,
Garrec, Pierre
,
Baron, Thierry
Published in
Microelectronics and reliability
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Compound Structure Devices
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Dielectric, Amorphous And Glass Solid Devices
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