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Piezoelectric micromachined ultrasonic transducers based on PZT thin films
by
Muralt, P.
,
Ledermann, N.
,
Paborowski, J.
,
Barzegar, A.
,
Gentil, S.
,
Belgacem, B.
,
Petitgrand, S.
,
Bosseboeuf, A.
,
Setter, N.
Published in
IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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Ieee Transactions On Ultrasonics, Ferroelectrics And Frequency Control
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Ieee Transactions On Ultrasonics, Ferroelectrics, And Frequency Control
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