Collision Cross Sections for O + Ar+ Collisions in the Energy Range 0.03–500 eV by Sycheva, A. A, Balint-Kurti, G. G, Palov, A. P

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Elastic Scattering of Mo-Mo, Mo-S and S-S Atomic Pairs in the Relative Kinetic Energy Range of 2–200 eV by Palov, A. P.

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Reaction of hydrogen atoms with singlet delta oxygen (O2(a1Δg)). Is everything completely clear? by Chukalovsky, A A, Klopovsky, K S, Palov, A P, Mankelevich, Yu A, Rakhimova, T V

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Modeling of the SiO Circumstellar Maser: Rate Coefficients for the Vibrationally-Rotationally Inelastic Scattering of H+SiO by Palov, A. P, Gray, M. D, Field, D, Balint-Kurti, G. G

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Dependence of electric potentials at trench surfaces on ion angular distribution in plasma etching processes by Palov, A P, Mankelevich, Yu A, Rakhimova, T V, Baklanov, M R

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Interaction of F atoms with SiOCH ultra low-k films. Part II: etching by Rakhimova, T V, Lopaev, D V, Mankelevich, Yu A, Kurchikov, K A, Zyryanov, S M, Palov, A P, Proshina, O V, Maslakov, K I, Baklanov, M R

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Analysis of the Results of Silicon Sputtering Simulation as Functions of Different Ar–Si Potentials by Sycheva, A. A., Voronina, E. N., Palov, A. P.

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Elastic scattering process for argon ions and oxygen atoms in 10-500 eV range of relative kinetic energies by Sycheva, A A, Palov, A P

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Charging and the secondary electron–electron emission on a trench surface: broadening and shift of ion energy spectrum at plasma trench etching by Palov, A P, Mankelevich, Yu A, Rakhimova, T V, Shamiryan, D

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VPA: Computer program for the computation of the phase shift in atom–atom potential scattering using the Variable Phase Approach by Palov, A.P., Balint-Kurti, G.G.

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Helium electron beam rf plasma for low-k surface functionalization by Voronina, Ekaterina N., Sycheva, Anastasia A., Solovykh, Alexander A., Proshina, Olga V., Rakhimova, Tatyana V., Palov, Alexander A. P., Rakhimov, Alexander T.

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Elastic scattering of an oxygen atom on a silicon atom in the 10–500 eV range of relative kinetic energies by Sycheva, A. A., Balint-Kurti, G. G., Palov, A. P.

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Charging of submicron structures during silicon dioxide etching in one- and two-frequency gas discharges by Palov, A. P., Mankelevich, Yu. A., Rakhimova, T. V., Shamiryan, D.

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Simulation of optical properties of silicon solar cells textured with penetrating V-shaped grooves by Untila, G. G., Palov, A. P., Poroykov, A. Yu, Rakhimova, T. V., Mankelevich, Yu. A., Kost, T. N., Chebotareva, A. B., Dvorkin, V. V.

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Simulation of electron transport in plasmas and solids by Palov, A.P., Pletnev, V.V., Tel'kovskii, V.B.

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Vibrationally-rotationally inelastic cross sections for H+SiO collisions by Palov, Alexander P., Jimeno, Pedro, Gray, Malcolm D., Field, David, Balint-Kurti, G. G.

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Electron Transport Simulation for the Ion-Electron Emission Problem by Palov, A P, Pletnev, V V, Tel'kovsky, V G

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Electron transport simulation for the ion-electron emission problem by Palov, AP, Pletnev, VV, Tel'kovsky, VG

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Electron transport simulation for the ion-electron emission problem by PALOV, A. P, PLETNEV, V. V, TEL'KOVSKY, V. G

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Simulation of electron transport in plasmas and solids by PALOV, A. P, PLETNEV, V. V, TEL'KOVSKII, V. B

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