Search Results - Paniez, Patrick

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  1. 1
    Development of Polymers in O 2 Plasmas: Temperature Effects and Transition to Imperfect Anisotropy

    Development of Polymers in O 2 Plasmas: Temperature Effects and Transition to Imperfect Anisotropy by Pons, Michel, Pelletier, Jacques, Joubert, Olivier, Patrick Paniez, Patrick Paniez

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  2. 2
    TOWARDS A BETTER UNDERSTANDING OF POSITIVE CHEMICALLY AMPLIFIED SYSTEMS

    TOWARDS A BETTER UNDERSTANDING OF POSITIVE CHEMICALLY AMPLIFIED SYSTEMS by PANIEZ, Patrick J., PAIN, Laurent

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  3. 3
    Study of advanced 193nm resists: Material properties and lithographic performance

    Study of advanced 193nm resists: Material properties and lithographic performance by Mortini, Benedicte, Gally, Severine, Sassoulas, Pierre-Olivier, Prola, Alain, Paniez, Patrick J.

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  4. 4
    Proximity E-beam exposure in submicron patterns using a silylation process

    Proximity E-beam exposure in submicron patterns using a silylation process by Vachette, Thierry G., Paniez, Patrick J., Lalanne, Frederic, Madore, Michel

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  5. 5
    Thermal conversion of ppv precursor: characterization at different stages of the process

    Thermal conversion of ppv precursor: characterization at different stages of the process by Wéry, Jany, Dulieu, Bertrand, Baïtoul, Mimouna, Paniez, Patrick, Froyer, Gérard, Lefrant, Serge

    Published in Synthetic metals
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  6. 6
    Silylation of three component E-beam resists: application to shipley SAL 601

    Silylation of three component E-beam resists: application to shipley SAL 601 by Vachette, Thierry G., Paniez, Patrick J., Madore, Michel

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  7. 7
    Development of polymers in O2 plasmas : temperature effects and transition to imperfect anisotropy

    Development of polymers in O2 plasmas : temperature effects and transition to imperfect anisotropy by PONS, M, PELLETIER, J, JOUBERT, O, PANIEZ, P

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  8. 8
    Cinétique de la diffusion de l'eau dans un film mince de photoresist

    Cinétique de la diffusion de l'eau dans un film mince de photoresist by Sebillote, Franc̨ois, Weill, André, Paniez, Patrick

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  9. 9
    Study of advanced 193nm resists

    Study of advanced 193nm resists by Mortini, Benedicte, Gally, Severine, Sassoulas, Pierre-Olivier, Prola, Alain, J. Paniez, Patrick

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  10. 10
    The novolak calibration method applied to the GPC analysis of the UV photoresists

    The novolak calibration method applied to the GPC analysis of the UV photoresists by Paniez, Patrick, Weill, André

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  11. 11
    Cinétique de la diffusion de l'eau dans un film mince de photoresist

    Cinétique de la diffusion de l'eau dans un film mince de photoresist by Sebillote, Franc̨ois, Weill, André, Paniez, Patrick

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