Search Results - Papanu, James S.

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  1. 1
    Surface characterization of ion-enhanced implanted photoresist removal

    Surface characterization of ion-enhanced implanted photoresist removal by Kawaguchi, Mark N., Papanu, James S., Su, Bo, Castle, Matthew, Al-Bayati, Amir

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  2. 2
    Low temperature, ion-enhanced, implanted photoresist removal

    Low temperature, ion-enhanced, implanted photoresist removal by Kawaguchi, Mark N., Papanu, James S., Pavel, Elizabeth G.

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  3. 3
    Surface modification and contamination characterization of ion-enhanced, implanted photoresist removal

    Surface modification and contamination characterization of ion-enhanced, implanted photoresist removal by Kawaguchi, Mark N., Papanu, James S., Chen, Han-Wen, Su, Bo, Verhaverbeke, Steven

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    In situ measurement of resist dissolution with a psi-meter

    In situ measurement of resist dissolution with a psi-meter by FLACK, W. W, PAPANU, J. S, HESS, D. W, SOONG, D. S, BELL, A. T

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  5. 5
    High Efficiency Wafer Backside Cleaning with Full Coverage Megasonics Spin Process

    High Efficiency Wafer Backside Cleaning with Full Coverage Megasonics Spin Process by Xie, Bo, Park, Sung Won, Han, Jung Ho, Li, Z Fred, Gouk, Roman, Lu, Wei, Jeon, Chung H., Subbaraman, Ven, Child, Kent, Wright, Jason, Papanu, James, Tang, Jianshe

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