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Growth and characterization of carbon nitride thin films prepared by laser ablation
by
Soto, R.
,
González, P.
,
Redondas, X.
,
Parada, E.G.
,
Pou, J.
,
León, B.
,
Pérez-Amor, M.
,
da Silva, M.F.
,
Soares, J.C.
Published in
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms
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Carbon nitride films prepared by excimer laser ablation
by
González, P
,
Soto, R
,
Parada, E.G
,
Redondas, X
,
Chiussi, S
,
Serra, J
,
Pou, J
,
León, B
,
Pérez-Amor, M
Published in
Applied surface science
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Modification of silicon nitride films to oxynitrides by ArF excimer laser irradiation
by
Serra, J.
,
Parada, E.G.
,
Gonzalez, P.
,
Fernández, D.
,
Chiussi, S.
,
Pou, J.
,
León, B.
,
Pérez-Amor, M.
Published in
Surface & coatings technology
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Improvement of silicon oxide film properties by ultraviolet excimer lamp annealing
by
Parada, E.G.
,
González, P.
,
Serra, J.
,
León, B.
,
Pérez-Amor, M.
,
Flicstein, J.
,
Devine, R.A.B.
Published in
Applied surface science
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Photochemical vapour deposition of hydrogenated amorphous silicon-carbon thin films by using a Xe 2∗ excimer lamp
by
Redondas, X.
,
González, P.
,
Chiussi, S.
,
Parada, E.G.
,
Pou, J.
,
León, B.
,
Pérez-Amor, M.
Published in
Applied surface science
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Hydrogen incorporation in silicon oxide films deposited by ArF laser-induced chemical vapor deposition
by
Parada, E.G.
,
González, P.
,
Serra, J.
,
León, B.
,
Pérez-Amor, M.
,
da Silva, M.F.
,
Wolters, H.
,
Soares, J.C.
Published in
Journal of non-crystalline solids
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Photochemical vapour deposition of hydrogenated amorphous silicon-carbon thin films by using a Xe2 excimer lamp
by
REDONDAS, X
,
GONZALEZ, P
,
CHIUSSI, S
,
PARADA, E. G
,
POU, J
,
LEON, B
,
PEREZ-AMOR, M
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Conference Proceeding
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