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Electromagnetically Actuated Surface Micromachined Free Standing Torsion Beam Micromirror Made by Electroplated Nickel
by
Prasciolu, Mauro
,
Carpentiero, Alessandro
,
Kumar, Rakesh
,
Cojoc, Daunt
,
Cabrini, Stafeno
,
Businaro, Luca
,
Romanato, Filippo
,
Di Fabrizio, Enzo
,
Recchia, Davide
,
Parmigiani, Gaberiale
Published in
Japanese Journal of Applied Physics
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Articles
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Journal Title
Japanese Journal Of Applied Physics
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Japanese Journal Of Applied Physics Part 1-Regular Papers Brief Communications & Review Papers
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Japanese Journal Of Applied Physics, Part 1: Regular Papers And Short Notes And Review Papers
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Japanese Journal Of Applied Physics. Part. 1, Regular Papers, Brief Communications & Review Papers
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Subjects
Electromagnetic Actuation
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Physical Sciences
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Physics
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Physics, Applied
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Sacrificial Photoresist Layer
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Science & Technology
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Torsion Beam Micromirror
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Institute Of Physics Iopscience Extra
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