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Selective Direct Laser Writing of Pyrolytic Carbon Microelectrodes in Absorber-Modified SU-8
by
Ludvigsen, Emil
,
Pedersen, Nina Ritter
,
Zhu, Xiaolong
,
Marie, Rodolphe
,
Mackenzie, David M. A.
,
Emnéus, Jenny
,
Petersen, Dirch Hjorth
,
Kristensen, Anders
,
Keller, Stephan Sylvest
Published in
Micromachines (Basel)
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Micromachines
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Subjects
Absorbers
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Carbon
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Chemistry
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Chemistry, Analytical
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Continuous Radiation
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Direct Laser Writing
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Electrical Resistivity
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Electrodes
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High Temperature
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Instruments & Instrumentation
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Irradiation
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Laser Pyrolysis
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Lasers
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Microelectrodes
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Nanoscience & Nanotechnology
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Photoresists
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Physical Sciences
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Physics
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Physics, Applied
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Plasma Etching
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