Search Results - Pekko, Panu

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  1. 1
    Determination of doping and temperature-dependent elastic constants of degenerately doped silicon from MEMS resonators

    Determination of doping and temperature-dependent elastic constants of degenerately doped silicon from MEMS resonators by Jaakkola, Antti, Prunnila, Mika, Pensala, Tuomas, Dekker, James, Pekko, Panu

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  2. 2
    Design Rules for Temperature Compensated Degenerately n-Type-Doped Silicon MEMS Resonators

    Design Rules for Temperature Compensated Degenerately n-Type-Doped Silicon MEMS Resonators by Jaakkola, Antti, Prunnila, Mika, Pensala, Tuomas, Dekker, James, Pekko, Panu

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  3. 3
    High-Q micromechanical resonators for mass sensing in dissipative media

    High-Q micromechanical resonators for mass sensing in dissipative media by Tappura, Kirsi, Pekko, Panu, Seppä, Heikki

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  4. 4
    A 3D micromechanical compass

    A 3D micromechanical compass by Kyynäräinen, Jukka, Saarilahti, Jaakko, Kattelus, Hannu, Kärkkäinen, Anu, Meinander, Tor, Oja, Aarne, Pekko, Panu, Seppä, Heikki, Suhonen, Mika, Kuisma, Heikki, Ruotsalainen, Sami, Tilli, Markku

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  5. 5
    Outgassing of Water Molecules During Silicon Fusion Bonding

    Outgassing of Water Molecules During Silicon Fusion Bonding by Gao, Feng, Hokkanen, Ari, Pekko, Panu, Kärkkäinen, Anu, Kiihamäki, Jyrki

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  6. 6
    Fabrication and Characterization of IC Compatible Through-Wafer Polysilicon Interconnects

    Fabrication and Characterization of IC Compatible Through-Wafer Polysilicon Interconnects by Luusua, Ismo, Henttinen, Kimmo, Pekko, Panu, Vehmas, Tapani

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  7. 7
    Optimized design and process for making a DC voltage reference based on MEMS

    Optimized design and process for making a DC voltage reference based on MEMS by Karkkainen, A., Awan, S.A., Kyynarainen, J., Pekko, P., Oja, A.S., Seppa, H.

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  8. 8
    Stable SOI micromachined electrostatic AC voltage reference

    Stable SOI micromachined electrostatic AC voltage reference by KÄRKKÄINEN, Anu, PEKKO, Panu, DEKKER, James, PESONEN, Nadine, SUHONEN, Mika, OJA, Aarne, KYYNÄRÄINEN, Jukka, SEPPÄ, Heikki

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  9. 9
    Second order temperature compensated piezoelectrically driven 23 MHz heavily doped silicon resonators with ±10 ppm temperature stability

    Second order temperature compensated piezoelectrically driven 23 MHz heavily doped silicon resonators with ±10 ppm temperature stability by Jaakkola, Antti, Pekko, Panu, Dekker, James, Prunnila, Mika, Pensala, Tuomas

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  10. 10
    Determination of Doping and Temperature Dependent Elastic Constants of Degenerately Doped Silicon from MEMS Resonators

    Determination of Doping and Temperature Dependent Elastic Constants of Degenerately Doped Silicon from MEMS Resonators by Jaakkola, Antti, Prunnila, Mika, Pensala, Tuomas, Dekker, James, Pekko, Panu

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  11. 11
    Long term stability and quality factors of degenerately n-type doped silicon resonators

    Long term stability and quality factors of degenerately n-type doped silicon resonators by Jaakkola, Antti, Gorelick, Sergey, Prunnila, Mika, Dekker, James, Pensala, Tuomas, Pekko, Panu

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  12. 12
    "Plug-up"-a new concept for fabricating SOI MEMS devices

    "Plug-up"-a new concept for fabricating SOI MEMS devices by Kiihamaki, J., Pekko, P., Kattelus, H., Sillanpaa, T., Mattila, T.

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